More than 20 years experience with:
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Measuring Technique
Highly precise measurement of optical and mechanical properties, like surface flatness, deformation, or layer thickness.
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Ergonomic Software
User-friendly interface according to SEMI standards; reliable and accurate classification;
networking for further evaluation.
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Optical Laboratory
Development of advanced optical setup and illumination modules, well adapted to customer needs.
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Dr. Schenk combines core competencies in-house including an optical and physical laboratory for innovative camera
and illumination solutions, as well as for sophisticated test and measurement applications.
A mechanical design center provides high precision and modular designs. Hardware and software specialists deliver
highest speed electronics, interfaces and reporting for user-friendly customized solutions.
SolarInspect
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Turnkey vision systems for quality assurance & process control throughout thin film solar module production.
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Pollux - Particle Detection for Photomasks
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Particle contamination can disrupt and delay the photolithography process, resulting in yield and
productivity losses. In order to avoid this, masks need to be routinely re-qualified. more
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