Pollux - Frequently Asked Questions

Does Pollux inspect both the glass and chrome side of the reticle at the same time, or does the reticle have to be flipped?

The reticle is placed horizontally on the loading stage with the chrome side facing downwards. The inspection of each side takes place successively during one cycle, fully automatically.

What is the cycle time of Pollux?

Inspection of both sides, including detection of the pellicle frame height and outline, takes about 45 to 70 seconds.

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