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New Directions in Surface Inspection

Trend-setting innovations developed by Dr. Schenk include special user-related solutions for manufacturing processes that point the way towards the future. Customized solutions for surface inspection and/or measurement of physical properties are being employed for optical lenses or e.g. in the semiconductor industry.




Pollux - Particle Detection for Photomasks

Particle contamination can disrupt and delay the photolithography process, resulting in yield and productivity losses. In order to avoid this, masks need to be routinely re-qualified. more