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Microscope Station for Perfect Scribe Analysis

For an optimized cell performance the width and distance between scribe lines is cruicial. Whereas a too thin scribe line might lead to short or bridge circuits a distance deviation can, in the worst case, lead to crossing of the lines.

Based on a high resolution matrix camera the Dr. Schenk Microscope Station has been developed as measurement solution with focus on this challenge. It is therefore the perfect enhancement to a surface inspection system.


Performed Measurements:

•   Width of scribe line Px
•   Distance of scribe line Px to Py


Key Advantages

  • Highest pixel resolution of the matrix camera (< 3 µm)
  • Autofocus function to compensate panel warpage
  • Up to 20 images per panel
  • Optimized illumination unit for reliable images
  • Images taken with no interruption of the panel movement
  • Ideal combination with SolarInspect
  • Also available as Stand-Alone-System

The Microscope Station enables timely reaction on deviations of the scribing process and by this helps to rise yield and optimize the production process.


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